Calibre® Computational Lithography

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Calibre nmOPC

 

Calibre nmOPC is the third-generation optical proximity correction (OPC) tool that expands the Calibre arsenal of resolution enhancement technology (RET) products for sub-65 nanometer (nm) process technologies.

 

Calibre OPCverify

 

Calibre OPCverify is the cornerstone technology that anchors the next generation of resolution enhancement technologies and design for manufacturing solutions.

   

 

Calibre OPCpro

 

Calibre OPCpro provides full-chip optical and process correction of complex IC layouts to increase yield and process latitude. Working with batch-oriented flows, Calibre OPCpro makes changes to a layout to compensate for lithography distortions inherent in the deep submicron manufacturing process.

 

Calibre WORKbench

 

Calibre WORKbench is an easy-to-use environment for creating accurate process models and tested, production-ready tool setup files.