Calibre Mask Data Preparation
Calibre FRACTURE
Calibre FRACTURE exports mask making data directly in the target mask writing format without changing tools or creating large intermediate files. Versions of Calibre FRACTURE are available for Micronic, JEOL, MEBES, Toshiba, and Hitachi formats. |
||
Calibre MDPmerge
Calibre MDPmerge enables a continuous flow from physical verification and resolution enhancement techniques (RET) through the completion of mask data preparation. |
||
|
|
Calibre MDPverify
Calibre MDPverify checks final mask writer data against the original GDSII definition to prevent mask writing with erroneous data. It supports the tracking of design updates by confirming the presence of desired changes in the final mask data independently of the fracture step. |
|
Calibre MASKOPT
Calibre MASKOPT reduces mask cost and mask writing time by lowering the total shot count through advanced pre-processing of the fractured data. Calibre MASKOPT can achieve up to 20% shot count reduction on data sets for advanced technology nodes at 45 nm and below. |
|
